JPH0577306B2 - - Google Patents

Info

Publication number
JPH0577306B2
JPH0577306B2 JP6487987A JP6487987A JPH0577306B2 JP H0577306 B2 JPH0577306 B2 JP H0577306B2 JP 6487987 A JP6487987 A JP 6487987A JP 6487987 A JP6487987 A JP 6487987A JP H0577306 B2 JPH0577306 B2 JP H0577306B2
Authority
JP
Japan
Prior art keywords
cathode
insulating material
alkali
anodic bonding
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6487987A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63229864A (ja
Inventor
Shigeo Oohashi
Takeshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishizuka Glass Co Ltd
Original Assignee
Ishizuka Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishizuka Glass Co Ltd filed Critical Ishizuka Glass Co Ltd
Priority to JP6487987A priority Critical patent/JPS63229864A/ja
Publication of JPS63229864A publication Critical patent/JPS63229864A/ja
Publication of JPH0577306B2 publication Critical patent/JPH0577306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Ceramic Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
JP6487987A 1987-03-19 1987-03-19 陽極接合方法 Granted JPS63229864A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6487987A JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6487987A JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Publications (2)

Publication Number Publication Date
JPS63229864A JPS63229864A (ja) 1988-09-26
JPH0577306B2 true JPH0577306B2 (en]) 1993-10-26

Family

ID=13270845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6487987A Granted JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Country Status (1)

Country Link
JP (1) JPS63229864A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07112939B2 (ja) * 1988-11-21 1995-12-06 三菱電機株式会社 シリコンウエハとガラス基板の陽極接合法

Also Published As

Publication number Publication date
JPS63229864A (ja) 1988-09-26

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